Electrical Engineering - How do you fabricate floating-gate transistors?

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How do you fabricate floating-gate transistors?

sendthis@gmail.com

2007-04-25, 1:25 pm

I'm assuming it's similar to the steps to fabricate a MOSFET but I
need the information for a briefing/paper I'm writing so I need a
source that's better than "my best guess".

Basically, just a generic step-by-step on how floating-gate
transistors are made and what techniques are commonly used. I'd
appreciate if someone could point me to a resource/reference because
I'm having a hard time using scholar.google.com, wiki, search engines,
IEEE, other journal article search tools, and <gasp> the library.

Thanks,
Eric

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